Interactions of Materials with Plasmas: Problems Unique to the Semiconductor Industry
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Abstract:
Thanks to the enhanced chemical reactivity provided by plasmas, the semiconductor industry uses plasma equipment throughout the device fabrication process. Plasmas are used to deposit semiconducting layers, metals and insulators and see extensive use in patterning processes. Pressures can range from ultra-high vacuum for deposition systems up to 4 atmospheres for Deep Ultra-violet laser systems. Plasmas create unique corrosion challenges and demands for extreme purity materials. This talk provides a sampling of interesting materials problems stemming from plasmas and discusses approaches for solving problems not readily discoverable in the scientific literature.
Thanks to the enhanced chemical reactivity provided by plasmas, the semiconductor industry uses plasma equipment throughout the device fabrication process. Plasmas are used to deposit semiconducting layers, metals and insulators and see extensive use in patterning processes. Pressures can range from ultra-high vacuum for deposition systems up to 4 atmospheres for Deep Ultra-violet laser systems. Plasmas create unique corrosion challenges and demands for extreme purity materials. This talk provides a sampling of interesting materials problems stemming from plasmas and discusses approaches for solving problems not readily discoverable in the scientific literature.
Bio:
Janine Kardokus is the president and CEO of Materials Development Resources, Inc.; a scientific consulting company. She has a Master of Science degree in Materials Sciences & Engineering from Stanford University and has worked in the electronics industry for 33 years. Before starting her own company, she worked for companies such as Intel, Texas Instruments, Applied Materials, Honeywell and ASML. In her career, she has developed a wide variety of metals, alloys and compound semiconductor products using a broad range of material processing technologies & analytical methods. She also has extensive experience solving materials related problems for semiconductor equipment companies.
Janine Kardokus is the president and CEO of Materials Development Resources, Inc.; a scientific consulting company. She has a Master of Science degree in Materials Sciences & Engineering from Stanford University and has worked in the electronics industry for 33 years. Before starting her own company, she worked for companies such as Intel, Texas Instruments, Applied Materials, Honeywell and ASML. In her career, she has developed a wide variety of metals, alloys and compound semiconductor products using a broad range of material processing technologies & analytical methods. She also has extensive experience solving materials related problems for semiconductor equipment companies.
